Active Vibration Isolation System compatible with a Thermo Fisher Scientific Verios 5 Ultra High Resolution Scanning Electron Microscope (UHR-SEM)

The High Temperature Materials Group in the Structures and Materials Performance Laboratory of the National Research Council’s (NRC) Aerospace (AERO-SMPL-HTM) requires an active vibration isolation (AVI) system to achieve the required performance of the group’s ultra-high resolution scanning electron microscope (UHR-SEM). AERO-SMPL-HTM uses its UHR-SEM in advanced research on a wide range of materials for various applications. However, the instrument cannot provide the highest possible image resolution due to significant low-frequency disturbances during high-magnification imaging. A new AVI system will effectively dampen mechanical vibrations and eliminate disruptive low-frequency vibration noise that interferes with image acquisition. The new system will allow the UHR-SEM to achieve its optimum performance, and enhance AERO-SMPL’s capability to conduct advanced research and provide data for a large number of the research projects.